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Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process

The modeling and fabrication of a magnetic microsensor based on a magneto-transistor were presented. The magnetic sensor is fabricated by the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process without any post-process. The finite element method (FEM) software Sentaurus TCAD is...

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Detalles Bibliográficos
Autores principales:	Tseng, Jian-Zhi, Wu, Chyan-Chyi, Dai, Ching-Liang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2014
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4029674/ https://www.ncbi.nlm.nih.gov/pubmed/24732100 http://dx.doi.org/10.3390/s140406722

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