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A preparation approach of exploring cluster ion implantation: from ultra-thin carbon film to graphene
Based on the extensive application of 2 × 1.7MV Tandetron accelerator, a low-energy cluster chamber has been built to explore for synthesizing graphene. Raman spectrum and atomic force microscopy (AFM) show that an amorphous carbon film in nanometer was deposited on the silicon by C(4) cluster impla...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer
2014
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4029969/ https://www.ncbi.nlm.nih.gov/pubmed/24910570 http://dx.doi.org/10.1186/1556-276X-9-205 |
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author | Wang, Zesong Zhang, Zaodi Zhang, Rui Li, Hui Fu, Dejun |
author_facet | Wang, Zesong Zhang, Zaodi Zhang, Rui Li, Hui Fu, Dejun |
author_sort | Wang, Zesong |
collection | PubMed |
description | Based on the extensive application of 2 × 1.7MV Tandetron accelerator, a low-energy cluster chamber has been built to explore for synthesizing graphene. Raman spectrum and atomic force microscopy (AFM) show that an amorphous carbon film in nanometer was deposited on the silicon by C(4) cluster implantation. And we replaced the substrate with Ni/SiO(2)/Si and measured the thickness of Ni film by Rutherford backscattering spectrometry (RBS). Combined with suitable anneal conditions, these samples implanted by various small carbon clusters were made to grow graphene. Results from Raman spectrum reveal that few-layer graphene were obtained and discuss whether I(G)/I(2D) can contribute to explain the relationship between the number of graphene layers and cluster implantation dosage. |
format | Online Article Text |
id | pubmed-4029969 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2014 |
publisher | Springer |
record_format | MEDLINE/PubMed |
spelling | pubmed-40299692014-06-06 A preparation approach of exploring cluster ion implantation: from ultra-thin carbon film to graphene Wang, Zesong Zhang, Zaodi Zhang, Rui Li, Hui Fu, Dejun Nanoscale Res Lett Nano Express Based on the extensive application of 2 × 1.7MV Tandetron accelerator, a low-energy cluster chamber has been built to explore for synthesizing graphene. Raman spectrum and atomic force microscopy (AFM) show that an amorphous carbon film in nanometer was deposited on the silicon by C(4) cluster implantation. And we replaced the substrate with Ni/SiO(2)/Si and measured the thickness of Ni film by Rutherford backscattering spectrometry (RBS). Combined with suitable anneal conditions, these samples implanted by various small carbon clusters were made to grow graphene. Results from Raman spectrum reveal that few-layer graphene were obtained and discuss whether I(G)/I(2D) can contribute to explain the relationship between the number of graphene layers and cluster implantation dosage. Springer 2014-05-02 /pmc/articles/PMC4029969/ /pubmed/24910570 http://dx.doi.org/10.1186/1556-276X-9-205 Text en Copyright © 2014 Wang et al.; licensee Springer. http://creativecommons.org/licenses/by/2.0 This is an Open Access article distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/2.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly credited. |
spellingShingle | Nano Express Wang, Zesong Zhang, Zaodi Zhang, Rui Li, Hui Fu, Dejun A preparation approach of exploring cluster ion implantation: from ultra-thin carbon film to graphene |
title | A preparation approach of exploring cluster ion implantation: from ultra-thin carbon film to graphene |
title_full | A preparation approach of exploring cluster ion implantation: from ultra-thin carbon film to graphene |
title_fullStr | A preparation approach of exploring cluster ion implantation: from ultra-thin carbon film to graphene |
title_full_unstemmed | A preparation approach of exploring cluster ion implantation: from ultra-thin carbon film to graphene |
title_short | A preparation approach of exploring cluster ion implantation: from ultra-thin carbon film to graphene |
title_sort | preparation approach of exploring cluster ion implantation: from ultra-thin carbon film to graphene |
topic | Nano Express |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4029969/ https://www.ncbi.nlm.nih.gov/pubmed/24910570 http://dx.doi.org/10.1186/1556-276X-9-205 |
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