Fabrication of 200 nm Period Hard X-ray Phase Gratings

[Image: see text] Far field X-ray grating interferometry achieves extraordinary phase sensitivity in imaging weakly absorbing samples, provided that the grating period is within the transverse coherence length of the X-ray source. Here we describe a cost-efficient process to fabricate large area, 10...

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Autores principales: Miao, Houxun, Gomella, Andrew A., Chedid, Nicholas, Chen, Lei, Wen, Han
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2014
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4055044/
https://www.ncbi.nlm.nih.gov/pubmed/24845537
http://dx.doi.org/10.1021/nl5009713
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author Miao, Houxun
Gomella, Andrew A.
Chedid, Nicholas
Chen, Lei
Wen, Han
author_facet Miao, Houxun
Gomella, Andrew A.
Chedid, Nicholas
Chen, Lei
Wen, Han
author_sort Miao, Houxun
collection PubMed
description [Image: see text] Far field X-ray grating interferometry achieves extraordinary phase sensitivity in imaging weakly absorbing samples, provided that the grating period is within the transverse coherence length of the X-ray source. Here we describe a cost-efficient process to fabricate large area, 100 nm half-pitch hard X-ray phase gratings with an aspect ratio of 32. The nanometric gratings are suitable for ordinary compact X-ray sources having low spatial coherence, as demonstrated by X-ray diffraction experiments.
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spelling pubmed-40550442015-05-20 Fabrication of 200 nm Period Hard X-ray Phase Gratings Miao, Houxun Gomella, Andrew A. Chedid, Nicholas Chen, Lei Wen, Han Nano Lett [Image: see text] Far field X-ray grating interferometry achieves extraordinary phase sensitivity in imaging weakly absorbing samples, provided that the grating period is within the transverse coherence length of the X-ray source. Here we describe a cost-efficient process to fabricate large area, 100 nm half-pitch hard X-ray phase gratings with an aspect ratio of 32. The nanometric gratings are suitable for ordinary compact X-ray sources having low spatial coherence, as demonstrated by X-ray diffraction experiments. American Chemical Society 2014-05-20 2014-06-11 /pmc/articles/PMC4055044/ /pubmed/24845537 http://dx.doi.org/10.1021/nl5009713 Text en Copyright © 2014 U.S. Government
spellingShingle Miao, Houxun
Gomella, Andrew A.
Chedid, Nicholas
Chen, Lei
Wen, Han
Fabrication of 200 nm Period Hard X-ray Phase Gratings
title Fabrication of 200 nm Period Hard X-ray Phase Gratings
title_full Fabrication of 200 nm Period Hard X-ray Phase Gratings
title_fullStr Fabrication of 200 nm Period Hard X-ray Phase Gratings
title_full_unstemmed Fabrication of 200 nm Period Hard X-ray Phase Gratings
title_short Fabrication of 200 nm Period Hard X-ray Phase Gratings
title_sort fabrication of 200 nm period hard x-ray phase gratings
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4055044/
https://www.ncbi.nlm.nih.gov/pubmed/24845537
http://dx.doi.org/10.1021/nl5009713
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AT chedidnicholas fabricationof200nmperiodhardxrayphasegratings
AT chenlei fabricationof200nmperiodhardxrayphasegratings
AT wenhan fabricationof200nmperiodhardxrayphasegratings

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