A Novel Micro- and Nano-Scale Positioning Sensor Based on Radio Frequency Resonant Cavities

In many micro- and nano-scale technological applications high sensitivity displacement sensors are needed, especially in ultraprecision metrology and manufacturing. In this work a new way of sensing displacement based on radio frequency resonant cavities is presented and experimentally demonstrated...

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Detalles Bibliográficos
Autores principales: Asua, Estibaliz, Etxebarria, Victor, García-Arribas, Alfredo, Feutchwanger, Jorge, Portilla, Joaquín, Lucas, Julio
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2014
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4118353/
https://www.ncbi.nlm.nih.gov/pubmed/24887041
http://dx.doi.org/10.3390/s140609615

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4118353/
https://www.ncbi.nlm.nih.gov/pubmed/24887041
http://dx.doi.org/10.3390/s140609615

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