Cargando…
A Novel Micro- and Nano-Scale Positioning Sensor Based on Radio Frequency Resonant Cavities
In many micro- and nano-scale technological applications high sensitivity displacement sensors are needed, especially in ultraprecision metrology and manufacturing. In this work a new way of sensing displacement based on radio frequency resonant cavities is presented and experimentally demonstrated...
| Autores principales: | , , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2014
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4118353/ https://www.ncbi.nlm.nih.gov/pubmed/24887041 http://dx.doi.org/10.3390/s140609615 |