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Modeling of a High Force Density Fishbone Shaped Electrostatic Comb Drive Microactuator

This paper presents the design and evaluation of a high force density fishbone shaped electrostatic comb drive actuator. This comb drive actuator has a branched structure similar to a fishbone, which is intended to increase the capacitance of the electrodes and hence increase the electrostatic actua...

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Detalles Bibliográficos
Autores principales:	Megat Hasnan, Megat Muhammad Ikhsan, Mohd Sabri, Mohd Faizul, Mohd Said, Suhana, Nik Ghazali, Nik Nazri
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Hindawi Publishing Corporation 2014
Materias:	Research Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4140127/ https://www.ncbi.nlm.nih.gov/pubmed/25165751 http://dx.doi.org/10.1155/2014/912683

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