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Bio-Inspired Micro-Fluidic Angular-Rate Sensor for Vestibular Prostheses
This paper presents an alternative approach for angular-rate sensing based on the way that the natural vestibular semicircular canals operate, whereby the inertial mass of a fluid is used to deform a sensing structure upon rotation. The presented gyro has been fabricated in a commercially available...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2014
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4168436/ https://www.ncbi.nlm.nih.gov/pubmed/25054631 http://dx.doi.org/10.3390/s140713173 |
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author | Andreou, Charalambos M. Pahitas, Yiannis Georgiou, Julius |
author_facet | Andreou, Charalambos M. Pahitas, Yiannis Georgiou, Julius |
author_sort | Andreou, Charalambos M. |
collection | PubMed |
description | This paper presents an alternative approach for angular-rate sensing based on the way that the natural vestibular semicircular canals operate, whereby the inertial mass of a fluid is used to deform a sensing structure upon rotation. The presented gyro has been fabricated in a commercially available MEMS process, which allows for microfluidic channels to be implemented in etched glass layers, which sandwich a bulk-micromachined silicon substrate, containing the sensing structures. Measured results obtained from a proof-of-concept device indicate an angular rate sensitivity of less than 1 °/s, which is similar to that of the natural vestibular system. By avoiding the use of a continually-excited vibrating mass, as is practiced in today's state-of-the-art gyroscopes, an ultra-low power consumption of 300 μW is obtained, thus making it suitable for implantation. |
format | Online Article Text |
id | pubmed-4168436 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2014 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-41684362014-09-19 Bio-Inspired Micro-Fluidic Angular-Rate Sensor for Vestibular Prostheses Andreou, Charalambos M. Pahitas, Yiannis Georgiou, Julius Sensors (Basel) Article This paper presents an alternative approach for angular-rate sensing based on the way that the natural vestibular semicircular canals operate, whereby the inertial mass of a fluid is used to deform a sensing structure upon rotation. The presented gyro has been fabricated in a commercially available MEMS process, which allows for microfluidic channels to be implemented in etched glass layers, which sandwich a bulk-micromachined silicon substrate, containing the sensing structures. Measured results obtained from a proof-of-concept device indicate an angular rate sensitivity of less than 1 °/s, which is similar to that of the natural vestibular system. By avoiding the use of a continually-excited vibrating mass, as is practiced in today's state-of-the-art gyroscopes, an ultra-low power consumption of 300 μW is obtained, thus making it suitable for implantation. MDPI 2014-07-22 /pmc/articles/PMC4168436/ /pubmed/25054631 http://dx.doi.org/10.3390/s140713173 Text en © 2014 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/). |
spellingShingle | Article Andreou, Charalambos M. Pahitas, Yiannis Georgiou, Julius Bio-Inspired Micro-Fluidic Angular-Rate Sensor for Vestibular Prostheses |
title | Bio-Inspired Micro-Fluidic Angular-Rate Sensor for Vestibular Prostheses |
title_full | Bio-Inspired Micro-Fluidic Angular-Rate Sensor for Vestibular Prostheses |
title_fullStr | Bio-Inspired Micro-Fluidic Angular-Rate Sensor for Vestibular Prostheses |
title_full_unstemmed | Bio-Inspired Micro-Fluidic Angular-Rate Sensor for Vestibular Prostheses |
title_short | Bio-Inspired Micro-Fluidic Angular-Rate Sensor for Vestibular Prostheses |
title_sort | bio-inspired micro-fluidic angular-rate sensor for vestibular prostheses |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4168436/ https://www.ncbi.nlm.nih.gov/pubmed/25054631 http://dx.doi.org/10.3390/s140713173 |
work_keys_str_mv | AT andreoucharalambosm bioinspiredmicrofluidicangularratesensorforvestibularprostheses AT pahitasyiannis bioinspiredmicrofluidicangularratesensorforvestibularprostheses AT georgioujulius bioinspiredmicrofluidicangularratesensorforvestibularprostheses |