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Wireless Displacement Sensing of Micromachined Spiral-Coil Actuator Using Resonant Frequency Tracking

This paper reports a method that enables real-time displacement monitoring and control of micromachined resonant-type actuators using wireless radiofrequency (RF). The method is applied to an out-of-plane, spiral-coil microactuator based on shape-memory-alloy (SMA). The SMA spiral coil forms an indu...

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Detalles Bibliográficos
Autores principales: Ali, Mohamed Sultan Mohamed, AbuZaiter, Alaa, Schlosser, Colin, Bycraft, Brad, Takahata, Kenichi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2014
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4168463/
https://www.ncbi.nlm.nih.gov/pubmed/25014100
http://dx.doi.org/10.3390/s140712399