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Developing Barbed Microtip-Based Electrode Arrays for Biopotential Measurement
This study involved fabricating barbed microtip-based electrode arrays by using silicon wet etching. KOH anisotropic wet etching was employed to form a standard pyramidal microtip array and HF/HNO(3) isotropic etching was used to fabricate barbs on these microtips. To improve the electrical conducta...
Autores principales: | Hsu, Li-Sheng, Tung, Shu-Wei, Kuo, Che-Hsi, Yang, Yao-Joe |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2014
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4168478/ https://www.ncbi.nlm.nih.gov/pubmed/25014098 http://dx.doi.org/10.3390/s140712370 |
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