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Developing Barbed Microtip-Based Electrode Arrays for Biopotential Measurement

This study involved fabricating barbed microtip-based electrode arrays by using silicon wet etching. KOH anisotropic wet etching was employed to form a standard pyramidal microtip array and HF/HNO(3) isotropic etching was used to fabricate barbs on these microtips. To improve the electrical conducta...

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Detalles Bibliográficos
Autores principales: Hsu, Li-Sheng, Tung, Shu-Wei, Kuo, Che-Hsi, Yang, Yao-Joe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2014
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4168478/
https://www.ncbi.nlm.nih.gov/pubmed/25014098
http://dx.doi.org/10.3390/s140712370

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