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A Micro Oxygen Sensor Based on a Nano Sol-Gel TiO(2) Thin Film

An oxygen gas microsensor based on nanostructured sol-gel TiO(2) thin films with a buried Pd layer was developed on a silicon substrate. The nanostructured titania thin films for O(2) sensors were prepared by the sol-gel process and became anatase after heat treatment. A sandwich TiO(2) square board...

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Detalles Bibliográficos
Autores principales:	Wang, Hairong, Chen, Lei, Wang, Jiaxin, Sun, Quantao, Zhao, Yulong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2014
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4208180/ https://www.ncbi.nlm.nih.gov/pubmed/25192312 http://dx.doi.org/10.3390/s140916423

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