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The Stiffness Variation of a Micro-Ring Driven by a Traveling Piecewise-Electrode

In the practice of electrostatically actuated micro devices; the electrostatic force is implemented by sequentially actuated piecewise-electrodes which result in a traveling distributed electrostatic force. However; such force was modeled as a traveling concentrated electrostatic force in literature...

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Autores principales: Li, Yingjie, Yu, Tao, Hu, Yuh-Chung
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2014
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4208223/
https://www.ncbi.nlm.nih.gov/pubmed/25230308
http://dx.doi.org/10.3390/s140917256
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author Li, Yingjie
Yu, Tao
Hu, Yuh-Chung
author_facet Li, Yingjie
Yu, Tao
Hu, Yuh-Chung
author_sort Li, Yingjie
collection PubMed
description In the practice of electrostatically actuated micro devices; the electrostatic force is implemented by sequentially actuated piecewise-electrodes which result in a traveling distributed electrostatic force. However; such force was modeled as a traveling concentrated electrostatic force in literatures. This article; for the first time; presents an analytical study on the stiffness variation of microstructures driven by a traveling piecewise electrode. The analytical model is based on the theory of shallow shell and uniform electrical field. The traveling electrode not only applies electrostatic force on the circular-ring but also alters its dynamical characteristics via the negative electrostatic stiffness. It is known that; when a structure is subjected to a traveling constant force; its natural mode will be resonated as the traveling speed approaches certain critical speeds; and each natural mode refers to exactly one critical speed. However; for the case of a traveling electrostatic force; the number of critical speeds is more than that of the natural modes. This is due to the fact that the traveling electrostatic force makes the resonant frequencies of the forward and backward traveling waves of the circular-ring different. Furthermore; the resonance and stability can be independently controlled by the length of the traveling electrode; though the driving voltage and traveling speed of the electrostatic force alter the dynamics and stabilities of microstructures. This paper extends the fundamental insights into the electromechanical behavior of microstructures driven by electrostatic forces as well as the future development of MEMS/NEMS devices with electrostatic actuation and sensing.
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spelling pubmed-42082232014-10-24 The Stiffness Variation of a Micro-Ring Driven by a Traveling Piecewise-Electrode Li, Yingjie Yu, Tao Hu, Yuh-Chung Sensors (Basel) Article In the practice of electrostatically actuated micro devices; the electrostatic force is implemented by sequentially actuated piecewise-electrodes which result in a traveling distributed electrostatic force. However; such force was modeled as a traveling concentrated electrostatic force in literatures. This article; for the first time; presents an analytical study on the stiffness variation of microstructures driven by a traveling piecewise electrode. The analytical model is based on the theory of shallow shell and uniform electrical field. The traveling electrode not only applies electrostatic force on the circular-ring but also alters its dynamical characteristics via the negative electrostatic stiffness. It is known that; when a structure is subjected to a traveling constant force; its natural mode will be resonated as the traveling speed approaches certain critical speeds; and each natural mode refers to exactly one critical speed. However; for the case of a traveling electrostatic force; the number of critical speeds is more than that of the natural modes. This is due to the fact that the traveling electrostatic force makes the resonant frequencies of the forward and backward traveling waves of the circular-ring different. Furthermore; the resonance and stability can be independently controlled by the length of the traveling electrode; though the driving voltage and traveling speed of the electrostatic force alter the dynamics and stabilities of microstructures. This paper extends the fundamental insights into the electromechanical behavior of microstructures driven by electrostatic forces as well as the future development of MEMS/NEMS devices with electrostatic actuation and sensing. MDPI 2014-09-16 /pmc/articles/PMC4208223/ /pubmed/25230308 http://dx.doi.org/10.3390/s140917256 Text en © 2014 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).
spellingShingle Article
Li, Yingjie
Yu, Tao
Hu, Yuh-Chung
The Stiffness Variation of a Micro-Ring Driven by a Traveling Piecewise-Electrode
title The Stiffness Variation of a Micro-Ring Driven by a Traveling Piecewise-Electrode
title_full The Stiffness Variation of a Micro-Ring Driven by a Traveling Piecewise-Electrode
title_fullStr The Stiffness Variation of a Micro-Ring Driven by a Traveling Piecewise-Electrode
title_full_unstemmed The Stiffness Variation of a Micro-Ring Driven by a Traveling Piecewise-Electrode
title_short The Stiffness Variation of a Micro-Ring Driven by a Traveling Piecewise-Electrode
title_sort stiffness variation of a micro-ring driven by a traveling piecewise-electrode
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4208223/
https://www.ncbi.nlm.nih.gov/pubmed/25230308
http://dx.doi.org/10.3390/s140917256
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