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CMOS-compatible metal-stabilized nanostructured Si as anodes for lithium-ion microbatteries

The properties of fully complementary metal-oxide semiconductor (CMOS)-compatible metal-coated nanostructured silicon anodes for Li-ion microbatteries have been studied. The one-dimensional nanowires on black silicon (nb-Si) were prepared by inductively coupled plasma (ICP) etching and the metal (Au...

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Detalles Bibliográficos
Autores principales: Lee, Gibaek, Schweizer, Stefan L, Wehrspohn, Ralf B
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2014
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4234740/
https://www.ncbi.nlm.nih.gov/pubmed/25411568
http://dx.doi.org/10.1186/1556-276X-9-613
Descripción
Sumario:The properties of fully complementary metal-oxide semiconductor (CMOS)-compatible metal-coated nanostructured silicon anodes for Li-ion microbatteries have been studied. The one-dimensional nanowires on black silicon (nb-Si) were prepared by inductively coupled plasma (ICP) etching and the metal (Au and Cu) coatings by successive magnetron sputtering technique. The Cu-coated nb-Si show the most promising electrochemical performance enhancements for the initial specific capacity as well as their cyclability compared to pristine nb-Si. The electrochemical and microstructural properties before and after cycling of the metal-coated nb-Si compared to their pristine counterparts are discussed in detail.