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CMOS-compatible metal-stabilized nanostructured Si as anodes for lithium-ion microbatteries
The properties of fully complementary metal-oxide semiconductor (CMOS)-compatible metal-coated nanostructured silicon anodes for Li-ion microbatteries have been studied. The one-dimensional nanowires on black silicon (nb-Si) were prepared by inductively coupled plasma (ICP) etching and the metal (Au...
Autores principales: | Lee, Gibaek, Schweizer, Stefan L, Wehrspohn, Ralf B |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer
2014
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4234740/ https://www.ncbi.nlm.nih.gov/pubmed/25411568 http://dx.doi.org/10.1186/1556-276X-9-613 |
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