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Femtosecond Laser Fabrication of Monolithically Integrated Microfluidic Sensors in Glass

Femtosecond lasers have revolutionized the processing of materials, since their ultrashort pulse width and extremely high peak intensity allows high-quality micro- and nanofabrication of three-dimensional (3D) structures. This unique capability opens up a new route for fabrication of microfluidic se...

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Detalles Bibliográficos
Autores principales: He, Fei, Liao, Yang, Lin, Jintian, Song, Jiangxin, Qiao, Lingling, Cheng, Ya, Sugioka, Koji
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2014
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4239949/
https://www.ncbi.nlm.nih.gov/pubmed/25330047
http://dx.doi.org/10.3390/s141019402
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author He, Fei
Liao, Yang
Lin, Jintian
Song, Jiangxin
Qiao, Lingling
Cheng, Ya
Sugioka, Koji
author_facet He, Fei
Liao, Yang
Lin, Jintian
Song, Jiangxin
Qiao, Lingling
Cheng, Ya
Sugioka, Koji
author_sort He, Fei
collection PubMed
description Femtosecond lasers have revolutionized the processing of materials, since their ultrashort pulse width and extremely high peak intensity allows high-quality micro- and nanofabrication of three-dimensional (3D) structures. This unique capability opens up a new route for fabrication of microfluidic sensors for biochemical applications. The present paper presents a comprehensive review of recent advancements in femtosecond laser processing of glass for a variety of microfluidic sensor applications. These include 3D integration of micro-/nanofluidic, optofluidic, electrofluidic, surface-enhanced Raman-scattering devices, in addition to fabrication of devices for microfluidic bioassays and lab-on-fiber sensors. This paper describes the unique characteristics of femtosecond laser processing and the basic concepts involved in femtosecond laser direct writing. Advanced spatiotemporal beam shaping methods are also discussed. Typical examples of microfluidic sensors fabricated using femtosecond lasers are then highlighted, and their applications in chemical and biological sensing are described. Finally, a summary of the technology is given and the outlook for further developments in this field is considered.
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spelling pubmed-42399492014-11-21 Femtosecond Laser Fabrication of Monolithically Integrated Microfluidic Sensors in Glass He, Fei Liao, Yang Lin, Jintian Song, Jiangxin Qiao, Lingling Cheng, Ya Sugioka, Koji Sensors (Basel) Review Femtosecond lasers have revolutionized the processing of materials, since their ultrashort pulse width and extremely high peak intensity allows high-quality micro- and nanofabrication of three-dimensional (3D) structures. This unique capability opens up a new route for fabrication of microfluidic sensors for biochemical applications. The present paper presents a comprehensive review of recent advancements in femtosecond laser processing of glass for a variety of microfluidic sensor applications. These include 3D integration of micro-/nanofluidic, optofluidic, electrofluidic, surface-enhanced Raman-scattering devices, in addition to fabrication of devices for microfluidic bioassays and lab-on-fiber sensors. This paper describes the unique characteristics of femtosecond laser processing and the basic concepts involved in femtosecond laser direct writing. Advanced spatiotemporal beam shaping methods are also discussed. Typical examples of microfluidic sensors fabricated using femtosecond lasers are then highlighted, and their applications in chemical and biological sensing are described. Finally, a summary of the technology is given and the outlook for further developments in this field is considered. MDPI 2014-10-17 /pmc/articles/PMC4239949/ /pubmed/25330047 http://dx.doi.org/10.3390/s141019402 Text en © 2014 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Review
He, Fei
Liao, Yang
Lin, Jintian
Song, Jiangxin
Qiao, Lingling
Cheng, Ya
Sugioka, Koji
Femtosecond Laser Fabrication of Monolithically Integrated Microfluidic Sensors in Glass
title Femtosecond Laser Fabrication of Monolithically Integrated Microfluidic Sensors in Glass
title_full Femtosecond Laser Fabrication of Monolithically Integrated Microfluidic Sensors in Glass
title_fullStr Femtosecond Laser Fabrication of Monolithically Integrated Microfluidic Sensors in Glass
title_full_unstemmed Femtosecond Laser Fabrication of Monolithically Integrated Microfluidic Sensors in Glass
title_short Femtosecond Laser Fabrication of Monolithically Integrated Microfluidic Sensors in Glass
title_sort femtosecond laser fabrication of monolithically integrated microfluidic sensors in glass
topic Review
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4239949/
https://www.ncbi.nlm.nih.gov/pubmed/25330047
http://dx.doi.org/10.3390/s141019402
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