Optical Gratings Coated with Thin Si(3)N(4) Layer for Efficient Immunosensing by Optical Waveguide Lightmode Spectroscopy

New silicon nitride coated optical gratings were tested by means of Optical Waveguide Lightmode Spectroscopy (OWLS). A thin layer of 10 nm of transparent silicon nitride was deposited on commercial optical gratings by means of sputtering. The quality of the layer was tested by x-ray photoelectron sp...

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Detalles Bibliográficos
Autores principales: Diéguez, Lorena, Caballero, David, Calderer, Josep, Moreno, Mauricio, Martínez, Elena, Samitier, Josep
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2012
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4263575/
https://www.ncbi.nlm.nih.gov/pubmed/25585707
http://dx.doi.org/10.3390/bios2020114
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author Diéguez, Lorena
Caballero, David
Calderer, Josep
Moreno, Mauricio
Martínez, Elena
Samitier, Josep
author_facet Diéguez, Lorena
Caballero, David
Calderer, Josep
Moreno, Mauricio
Martínez, Elena
Samitier, Josep
author_sort Diéguez, Lorena
collection PubMed
description New silicon nitride coated optical gratings were tested by means of Optical Waveguide Lightmode Spectroscopy (OWLS). A thin layer of 10 nm of transparent silicon nitride was deposited on commercial optical gratings by means of sputtering. The quality of the layer was tested by x-ray photoelectron spectroscopy and atomic force microscopy. As a proof of concept, the sensors were successfully tested with OWLS by monitoring the concentration dependence on the detection of an antibody-protein pair. The potential of the Si(3)N(4) as functional layer in a real-time biosensor opens new ways for the integration of optical waveguides with microelectronics.
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spelling pubmed-42635752015-01-13 Optical Gratings Coated with Thin Si(3)N(4) Layer for Efficient Immunosensing by Optical Waveguide Lightmode Spectroscopy Diéguez, Lorena Caballero, David Calderer, Josep Moreno, Mauricio Martínez, Elena Samitier, Josep Biosensors (Basel) Article New silicon nitride coated optical gratings were tested by means of Optical Waveguide Lightmode Spectroscopy (OWLS). A thin layer of 10 nm of transparent silicon nitride was deposited on commercial optical gratings by means of sputtering. The quality of the layer was tested by x-ray photoelectron spectroscopy and atomic force microscopy. As a proof of concept, the sensors were successfully tested with OWLS by monitoring the concentration dependence on the detection of an antibody-protein pair. The potential of the Si(3)N(4) as functional layer in a real-time biosensor opens new ways for the integration of optical waveguides with microelectronics. MDPI 2012-04-10 /pmc/articles/PMC4263575/ /pubmed/25585707 http://dx.doi.org/10.3390/bios2020114 Text en © 2012 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).
spellingShingle Article
Diéguez, Lorena
Caballero, David
Calderer, Josep
Moreno, Mauricio
Martínez, Elena
Samitier, Josep
Optical Gratings Coated with Thin Si(3)N(4) Layer for Efficient Immunosensing by Optical Waveguide Lightmode Spectroscopy
title Optical Gratings Coated with Thin Si(3)N(4) Layer for Efficient Immunosensing by Optical Waveguide Lightmode Spectroscopy
title_full Optical Gratings Coated with Thin Si(3)N(4) Layer for Efficient Immunosensing by Optical Waveguide Lightmode Spectroscopy
title_fullStr Optical Gratings Coated with Thin Si(3)N(4) Layer for Efficient Immunosensing by Optical Waveguide Lightmode Spectroscopy
title_full_unstemmed Optical Gratings Coated with Thin Si(3)N(4) Layer for Efficient Immunosensing by Optical Waveguide Lightmode Spectroscopy
title_short Optical Gratings Coated with Thin Si(3)N(4) Layer for Efficient Immunosensing by Optical Waveguide Lightmode Spectroscopy
title_sort optical gratings coated with thin si(3)n(4) layer for efficient immunosensing by optical waveguide lightmode spectroscopy
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4263575/
https://www.ncbi.nlm.nih.gov/pubmed/25585707
http://dx.doi.org/10.3390/bios2020114
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