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Sol-Gel Zinc Oxide Humidity Sensors Integrated with a Ring Oscillator Circuit On-a-Chip

The study develops an integrated humidity microsensor fabricated using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The integrated humidity sensor consists of a humidity sensor and a ring oscillator circuit on-a-chip. The humidity sensor is composed of a sensitive f...

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Detalles Bibliográficos
Autores principales:	Yang, Ming-Zhi, Dai, Ching-Liang, Wu, Chyan-Chyi
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2014
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4279487/ https://www.ncbi.nlm.nih.gov/pubmed/25353984 http://dx.doi.org/10.3390/s141120360

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