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Coherent X-Ray Diffraction Imaging and Characterization of Strain in Silicon-on-Insulator Nanostructures

Coherent X-ray diffraction imaging (CDI) has emerged in the last decade as a promising high resolution lens-less imaging approach for the characterization of various samples. It has made significant technical progress through developments in source, algorithm and imaging methodologies thus enabling...

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Detalles Bibliográficos
Autores principales:	Xiong, Gang, Moutanabbir, Oussama, Reiche, Manfred, Harder, Ross, Robinson, Ian
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	BlackWell Publishing Ltd 2014
Materias:	Progress Reports
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4282757/ https://www.ncbi.nlm.nih.gov/pubmed/24955950 http://dx.doi.org/10.1002/adma.201304511

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