Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of ~2.5 × 10(5)...

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Autores principales: Lin, Jintian, Xu, Yingxin, Fang, Zhiwei, Wang, Min, Song, Jiangxin, Wang, Nengwen, Qiao, Lingling, Fang, Wei, Cheng, Ya
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4308694/
https://www.ncbi.nlm.nih.gov/pubmed/25627294
http://dx.doi.org/10.1038/srep08072
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author Lin, Jintian
Xu, Yingxin
Fang, Zhiwei
Wang, Min
Song, Jiangxin
Wang, Nengwen
Qiao, Lingling
Fang, Wei
Cheng, Ya
author_facet Lin, Jintian
Xu, Yingxin
Fang, Zhiwei
Wang, Min
Song, Jiangxin
Wang, Nengwen
Qiao, Lingling
Fang, Wei
Cheng, Ya
author_sort Lin, Jintian
collection PubMed
description We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of ~2.5 × 10(5) around 1550 nm wavelength. The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators.
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spelling pubmed-43086942015-02-06 Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining Lin, Jintian Xu, Yingxin Fang, Zhiwei Wang, Min Song, Jiangxin Wang, Nengwen Qiao, Lingling Fang, Wei Cheng, Ya Sci Rep Article We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of ~2.5 × 10(5) around 1550 nm wavelength. The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators. Nature Publishing Group 2015-01-28 /pmc/articles/PMC4308694/ /pubmed/25627294 http://dx.doi.org/10.1038/srep08072 Text en Copyright © 2015, Macmillan Publishers Limited. All rights reserved http://creativecommons.org/licenses/by/4.0/ This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article's Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder in order to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/
spellingShingle Article
Lin, Jintian
Xu, Yingxin
Fang, Zhiwei
Wang, Min
Song, Jiangxin
Wang, Nengwen
Qiao, Lingling
Fang, Wei
Cheng, Ya
Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining
title Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining
title_full Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining
title_fullStr Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining
title_full_unstemmed Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining
title_short Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining
title_sort fabrication of high-q lithium niobate microresonators using femtosecond laser micromachining
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4308694/
https://www.ncbi.nlm.nih.gov/pubmed/25627294
http://dx.doi.org/10.1038/srep08072
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