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Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of ~2.5 × 10(5)...

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Detalles Bibliográficos
Autores principales:	Lin, Jintian, Xu, Yingxin, Fang, Zhiwei, Wang, Min, Song, Jiangxin, Wang, Nengwen, Qiao, Lingling, Fang, Wei, Cheng, Ya
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group 2015
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4308694/ https://www.ncbi.nlm.nih.gov/pubmed/25627294 http://dx.doi.org/10.1038/srep08072

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