Design and Fabrication of Interdigital Nanocapacitors Coated with HfO(2)

In this article nickel interdigital capacitors were fabricated on top of silicon substrates. The capacitance of the interdigital capacitor was optimized by coating the electrodes with a 60 nm layer of HfO(2). An analytical solution of the capacitance was compared to electromagnetic simulations using...

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Detalles Bibliográficos
Autores principales: González, Gabriel, Kolosovas-Machuca, Eleazar Samuel, López-Luna, Edgar, Hernández-Arriaga, Heber, González, Francisco Javier
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4327113/
https://www.ncbi.nlm.nih.gov/pubmed/25602271
http://dx.doi.org/10.3390/s150101998
Descripción
Sumario:In this article nickel interdigital capacitors were fabricated on top of silicon substrates. The capacitance of the interdigital capacitor was optimized by coating the electrodes with a 60 nm layer of HfO(2). An analytical solution of the capacitance was compared to electromagnetic simulations using COMSOL and with experimental measurements. Results show that modeling interdigital capacitors using Finite Element Method software such as COMSOL is effective in the design and electrical characterization of these transducers.

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