Design and Fabrication of Interdigital Nanocapacitors Coated with HfO(2)

In this article nickel interdigital capacitors were fabricated on top of silicon substrates. The capacitance of the interdigital capacitor was optimized by coating the electrodes with a 60 nm layer of HfO(2). An analytical solution of the capacitance was compared to electromagnetic simulations using...

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Detalles Bibliográficos
Autores principales: González, Gabriel, Kolosovas-Machuca, Eleazar Samuel, López-Luna, Edgar, Hernández-Arriaga, Heber, González, Francisco Javier
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4327113/
https://www.ncbi.nlm.nih.gov/pubmed/25602271
http://dx.doi.org/10.3390/s150101998
_version_ 1782357016792006656
author González, Gabriel
Kolosovas-Machuca, Eleazar Samuel
López-Luna, Edgar
Hernández-Arriaga, Heber
González, Francisco Javier
author_facet González, Gabriel
Kolosovas-Machuca, Eleazar Samuel
López-Luna, Edgar
Hernández-Arriaga, Heber
González, Francisco Javier
author_sort González, Gabriel
collection PubMed
description In this article nickel interdigital capacitors were fabricated on top of silicon substrates. The capacitance of the interdigital capacitor was optimized by coating the electrodes with a 60 nm layer of HfO(2). An analytical solution of the capacitance was compared to electromagnetic simulations using COMSOL and with experimental measurements. Results show that modeling interdigital capacitors using Finite Element Method software such as COMSOL is effective in the design and electrical characterization of these transducers.
format Online
Article
Text
id pubmed-4327113
institution National Center for Biotechnology Information
language English
publishDate 2015
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-43271132015-02-23 Design and Fabrication of Interdigital Nanocapacitors Coated with HfO(2) González, Gabriel Kolosovas-Machuca, Eleazar Samuel López-Luna, Edgar Hernández-Arriaga, Heber González, Francisco Javier Sensors (Basel) Article In this article nickel interdigital capacitors were fabricated on top of silicon substrates. The capacitance of the interdigital capacitor was optimized by coating the electrodes with a 60 nm layer of HfO(2). An analytical solution of the capacitance was compared to electromagnetic simulations using COMSOL and with experimental measurements. Results show that modeling interdigital capacitors using Finite Element Method software such as COMSOL is effective in the design and electrical characterization of these transducers. MDPI 2015-01-16 /pmc/articles/PMC4327113/ /pubmed/25602271 http://dx.doi.org/10.3390/s150101998 Text en © 2015 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
González, Gabriel
Kolosovas-Machuca, Eleazar Samuel
López-Luna, Edgar
Hernández-Arriaga, Heber
González, Francisco Javier
Design and Fabrication of Interdigital Nanocapacitors Coated with HfO(2)
title Design and Fabrication of Interdigital Nanocapacitors Coated with HfO(2)
title_full Design and Fabrication of Interdigital Nanocapacitors Coated with HfO(2)
title_fullStr Design and Fabrication of Interdigital Nanocapacitors Coated with HfO(2)
title_full_unstemmed Design and Fabrication of Interdigital Nanocapacitors Coated with HfO(2)
title_short Design and Fabrication of Interdigital Nanocapacitors Coated with HfO(2)
title_sort design and fabrication of interdigital nanocapacitors coated with hfo(2)
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4327113/
https://www.ncbi.nlm.nih.gov/pubmed/25602271
http://dx.doi.org/10.3390/s150101998
work_keys_str_mv AT gonzalezgabriel designandfabricationofinterdigitalnanocapacitorscoatedwithhfo2
AT kolosovasmachucaeleazarsamuel designandfabricationofinterdigitalnanocapacitorscoatedwithhfo2
AT lopezlunaedgar designandfabricationofinterdigitalnanocapacitorscoatedwithhfo2
AT hernandezarriagaheber designandfabricationofinterdigitalnanocapacitorscoatedwithhfo2
AT gonzalezfranciscojavier designandfabricationofinterdigitalnanocapacitorscoatedwithhfo2

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