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Competition between surface modification and abrasive polishing: a method of controlling the surface atomic structure of 4H-SiC (0001)
The surface atomic step-terrace structure of 4H-SiC greatly affects its performance in power device applications. On the basis of the crystal structure of 4H-SiC, we propose the generation mechanism of the a-b-a*-b* type, a-b type and a-a type step-terrace structures. We demonstrate that the step-te...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group
2015
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4353996/ https://www.ncbi.nlm.nih.gov/pubmed/25752524 http://dx.doi.org/10.1038/srep08947 |