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A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT

This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method...

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Detalles Bibliográficos
Autores principales:	Wang, Zhe, Xue, Qing-Tang, Chen, Yuan-Quan, Shu, Yi, Tian, He, Yang, Yi, Xie, Dan, Luo, Jian-Wen, Ren, Tian-Ling
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2015
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4367319/ https://www.ncbi.nlm.nih.gov/pubmed/25625905 http://dx.doi.org/10.3390/s150202538

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