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Biosensor for human IgE detection using shear-mode FBAR devices

Film bulk acoustic resonators (FBARs) have been evaluated for use as biosensors because of their high sensitivity and small size. This study fabricated a novel human IgE biosensor using shear-mode FBAR devices with c-axis 23°-tilted AlN thin films. Off-axis radio frequency (RF) magnetron sputtering...

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Detalles Bibliográficos
Autores principales:	Chen, Ying-Chung, Shih, Wei-Che, Chang, Wei-Tsai, Yang, Chun-Hung, Kao, Kuo-Sheng, Cheng, Chien-Chuan
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer US 2015
Materias:	Nano Express
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4385051/ https://www.ncbi.nlm.nih.gov/pubmed/25852365 http://dx.doi.org/10.1186/s11671-015-0736-3

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