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High-performance HfO(x)/AlO(y)-based resistive switching memory cross-point array fabricated by atomic layer deposition

Resistive switching memory cross-point arrays with TiN/HfO(x)/AlO(y)/Pt structure were fabricated. The bi-layered resistive switching films of 5-nm HfO(x) and 3-nm AlO(y) were deposited by atomic layer deposition (ALD). Excellent device performances such as low switching voltage, large resistance ra...

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Detalles Bibliográficos
Autores principales:	Chen, Zhe, Zhang, Feifei, Chen, Bing, Zheng, Yang, Gao, Bin, Liu, Lifeng, Liu, Xiaoyan, Kang, Jinfeng
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer US 2015
Materias:	Nano Express
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4385114/ https://www.ncbi.nlm.nih.gov/pubmed/25852366 http://dx.doi.org/10.1186/s11671-015-0738-1

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