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Surface Modifications Induced by High Fluxes of Low Energy Helium Ions

Several metal surfaces, such as titanium, aluminum and copper, were exposed to high fluxes (in the range of 10(23) m(−2)s(−1)) of low energy (<100 eV) Helium (He) ions. The surfaces were analyzed by scanning electron microscopy and to get a better understanding on morphology changes both top view...

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Detalles Bibliográficos
Autores principales: Tanyeli, İrem, Marot, Laurent, Mathys, Daniel, van de Sanden, Mauritius C. M., De Temmerman, Gregory
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2015
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4412079/
https://www.ncbi.nlm.nih.gov/pubmed/25919912
http://dx.doi.org/10.1038/srep09779
Descripción
Sumario:Several metal surfaces, such as titanium, aluminum and copper, were exposed to high fluxes (in the range of 10(23) m(−2)s(−1)) of low energy (<100 eV) Helium (He) ions. The surfaces were analyzed by scanning electron microscopy and to get a better understanding on morphology changes both top view and cross sectional images were taken. Different surface modifications, such as voids and nano pillars, are observed on these metals. The differences and similarities in the development of surface morphologies are discussed in terms of the material properties and compared with the results of similar experimental studies. The results show that He ions induced void growth and physical sputtering play a significant role in surface modification using high fluxes of low energy He ions.