Surface Modifications Induced by High Fluxes of Low Energy Helium Ions

Several metal surfaces, such as titanium, aluminum and copper, were exposed to high fluxes (in the range of 10(23) m(−2)s(−1)) of low energy (<100 eV) Helium (He) ions. The surfaces were analyzed by scanning electron microscopy and to get a better understanding on morphology changes both top view...

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Autores principales: Tanyeli, İrem, Marot, Laurent, Mathys, Daniel, van de Sanden, Mauritius C. M., De Temmerman, Gregory
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4412079/
https://www.ncbi.nlm.nih.gov/pubmed/25919912
http://dx.doi.org/10.1038/srep09779
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author Tanyeli, İrem
Marot, Laurent
Mathys, Daniel
van de Sanden, Mauritius C. M.
De Temmerman, Gregory
author_facet Tanyeli, İrem
Marot, Laurent
Mathys, Daniel
van de Sanden, Mauritius C. M.
De Temmerman, Gregory
author_sort Tanyeli, İrem
collection PubMed
description Several metal surfaces, such as titanium, aluminum and copper, were exposed to high fluxes (in the range of 10(23) m(−2)s(−1)) of low energy (<100 eV) Helium (He) ions. The surfaces were analyzed by scanning electron microscopy and to get a better understanding on morphology changes both top view and cross sectional images were taken. Different surface modifications, such as voids and nano pillars, are observed on these metals. The differences and similarities in the development of surface morphologies are discussed in terms of the material properties and compared with the results of similar experimental studies. The results show that He ions induced void growth and physical sputtering play a significant role in surface modification using high fluxes of low energy He ions.
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spelling pubmed-44120792015-05-08 Surface Modifications Induced by High Fluxes of Low Energy Helium Ions Tanyeli, İrem Marot, Laurent Mathys, Daniel van de Sanden, Mauritius C. M. De Temmerman, Gregory Sci Rep Article Several metal surfaces, such as titanium, aluminum and copper, were exposed to high fluxes (in the range of 10(23) m(−2)s(−1)) of low energy (<100 eV) Helium (He) ions. The surfaces were analyzed by scanning electron microscopy and to get a better understanding on morphology changes both top view and cross sectional images were taken. Different surface modifications, such as voids and nano pillars, are observed on these metals. The differences and similarities in the development of surface morphologies are discussed in terms of the material properties and compared with the results of similar experimental studies. The results show that He ions induced void growth and physical sputtering play a significant role in surface modification using high fluxes of low energy He ions. Nature Publishing Group 2015-04-28 /pmc/articles/PMC4412079/ /pubmed/25919912 http://dx.doi.org/10.1038/srep09779 Text en Copyright © 2015, Macmillan Publishers Limited. All rights reserved http://creativecommons.org/licenses/by/4.0/ This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article's Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder in order to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/
spellingShingle Article
Tanyeli, İrem
Marot, Laurent
Mathys, Daniel
van de Sanden, Mauritius C. M.
De Temmerman, Gregory
Surface Modifications Induced by High Fluxes of Low Energy Helium Ions
title Surface Modifications Induced by High Fluxes of Low Energy Helium Ions
title_full Surface Modifications Induced by High Fluxes of Low Energy Helium Ions
title_fullStr Surface Modifications Induced by High Fluxes of Low Energy Helium Ions
title_full_unstemmed Surface Modifications Induced by High Fluxes of Low Energy Helium Ions
title_short Surface Modifications Induced by High Fluxes of Low Energy Helium Ions
title_sort surface modifications induced by high fluxes of low energy helium ions
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4412079/
https://www.ncbi.nlm.nih.gov/pubmed/25919912
http://dx.doi.org/10.1038/srep09779
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