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Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging

Many applications of ultrasound for sensing, actuation and imaging require miniaturized and low power transducers and transducer arrays integrated with electronic systems. Piezoelectric micromachined ultrasound transducers (PMUTs), diaphragm-like thin film flexural transducers typically formed on si...

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Detalles Bibliográficos
Autores principales:	Qiu, Yongqiang, Gigliotti, James V., Wallace, Margeaux, Griggio, Flavio, Demore, Christine E. M., Cochran, Sandy, Trolier-McKinstry, Susan
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2015
Materias:	Review
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4431219/ https://www.ncbi.nlm.nih.gov/pubmed/25855038 http://dx.doi.org/10.3390/s150408020

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