The Development of Love Wave-Based Humidity Sensors Incorporating Multiple Layers

A Love wave humidity sensor is developed by using a multilayer structure consisting of PVA/SiO(2) layers on an ST-90°X quartz substrate. The theoretical result shows that the sensor with such a two-layer structure can achieve a higher sensitivity and a smaller loss than the structures with a single...

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Detalles Bibliográficos
Autores principales: Wang, Lijun, Liu, Jiansheng, He, Shitang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4431282/
https://www.ncbi.nlm.nih.gov/pubmed/25875187
http://dx.doi.org/10.3390/s150408615
Descripción
Sumario:A Love wave humidity sensor is developed by using a multilayer structure consisting of PVA/SiO(2) layers on an ST-90°X quartz substrate. The theoretical result shows that the sensor with such a two-layer structure can achieve a higher sensitivity and a smaller loss than the structures with a single polymer layer. Comparative experiments are performed for the sensor incorporating PVA/SiO(2) layers and the sensor incorporating a PVA layer. The experimental results agree well with the theoretical predication.

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