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MEMS Flow Sensors Based on Self-Heated aGe-Thermistors in a Wheatstone Bridge

A thermal flow transduction method combining the advantages of calorimetric and hot-film transduction principles is developed and analyzed by Finite Element Method (FEM) simulations and confirmed experimentally. The analyses include electrothermal feedback effects of current driven NTC thermistors....

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Detalles Bibliográficos
Autores principales:	Talic, Almir, Cerimovic, Samir, Beigelbeck, Roman, Kohl, Franz, Sauter, Thilo, Keplinger, Franz
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2015
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4481909/ https://www.ncbi.nlm.nih.gov/pubmed/25928062 http://dx.doi.org/10.3390/s150510004

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