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A Tapered Aluminium Microelectrode Array for Improvement of Dielectrophoresis-Based Particle Manipulation
In this work, the dielectrophoretic force (F(DEP)) response of Aluminium Microelectrode Arrays with tapered profile is investigated through experimental measurements and numerical simulations. A standard CMOS processing technique with a step for the formation of a tapered profile resist is implement...
Autores principales: | Buyong, Muhamad Ramdzan, Larki, Farhad, Faiz, Mohd Syafiq, Hamzah, Azrul Azlan, Yunas, Jumrail, Majlis, Burhanuddin Yeop |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2015
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4481918/ https://www.ncbi.nlm.nih.gov/pubmed/25970255 http://dx.doi.org/10.3390/s150510973 |
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