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A Tapered Aluminium Microelectrode Array for Improvement of Dielectrophoresis-Based Particle Manipulation

In this work, the dielectrophoretic force (F(DEP)) response of Aluminium Microelectrode Arrays with tapered profile is investigated through experimental measurements and numerical simulations. A standard CMOS processing technique with a step for the formation of a tapered profile resist is implement...

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Detalles Bibliográficos
Autores principales:	Buyong, Muhamad Ramdzan, Larki, Farhad, Faiz, Mohd Syafiq, Hamzah, Azrul Azlan, Yunas, Jumrail, Majlis, Burhanuddin Yeop
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2015
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4481918/ https://www.ncbi.nlm.nih.gov/pubmed/25970255 http://dx.doi.org/10.3390/s150510973

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