Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type

Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors...

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Detalles Bibliográficos
Autores principales: Tsai, Cheng-Hua, Tsai, Chun-Wei, Chang, Hsu-Tang, Liu, Shih-Hsiang, Tsai, Jui-Che
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4507607/
https://www.ncbi.nlm.nih.gov/pubmed/26110409
http://dx.doi.org/10.3390/s150614745
Descripción
Sumario:Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors. Electrothermal actuation has achieved a large angular movement in the micromirrors. Application of an external electric current 0.04 A to the bending-type, restricted-torsion-type, and free-torsion-type mirrors achieved rotation angles of 1.69°, 3.28°, and 3.64°, respectively.

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