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Microfabrication and Integration of a Sol-Gel PZT Folded Spring Energy Harvester

This paper presents the methodology and challenges experienced in the microfabrication, packaging, and integration of a fixed-fixed folded spring piezoelectric energy harvester. A variety of challenges were overcome in the fabrication of the energy harvesters, such as the diagnosis and rectification...

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Detalles Bibliográficos
Autores principales: Lueke, Jonathan, Badr, Ahmed, Lou, Edmond, Moussa, Walied A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2015
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4507646/
https://www.ncbi.nlm.nih.gov/pubmed/26016911
http://dx.doi.org/10.3390/s150612218