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Microfabrication and Integration of a Sol-Gel PZT Folded Spring Energy Harvester
This paper presents the methodology and challenges experienced in the microfabrication, packaging, and integration of a fixed-fixed folded spring piezoelectric energy harvester. A variety of challenges were overcome in the fabrication of the energy harvesters, such as the diagnosis and rectification...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2015
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4507646/ https://www.ncbi.nlm.nih.gov/pubmed/26016911 http://dx.doi.org/10.3390/s150612218 |