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One-Step Mask Etching Strategy Toward Ordered Ferroelectric Pb(Zr(0.52)Ti(0.48))O(3) Nanodot Arrays
In this report, ordered lead zirconate titanate Pb(Zr(0.52)Ti(0.48))O(3) (PZT) nanodot arrays were fabricated by an original one-step mask etching route. The one-step mask etching strategy is based on the patterned nanostructure of barrier layer (BL) at the bottom of anodic aluminum oxide (AAO), by...
Autores principales: | , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer US
2015
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4527975/ https://www.ncbi.nlm.nih.gov/pubmed/26248551 http://dx.doi.org/10.1186/s11671-015-1028-7 |