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Fabrication and Characterization of a CMOS-MEMS Humidity Sensor

This paper reports on the fabrication and characterization of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded microheater operated at relatively elevated temperatures (40 °C to 80 °C) for the purpose of relative humidity measurement. The sensi...

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Detalles Bibliográficos
Autores principales:	Dennis, John-Ojur, Ahmed, Abdelaziz-Yousif, Khir, Mohd-Haris
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2015
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4541900/ https://www.ncbi.nlm.nih.gov/pubmed/26184204 http://dx.doi.org/10.3390/s150716674

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