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Microhotplate Temperature Sensor Calibration and BIST
In this paper we describe a novel long-term microhotplate temperature sensor calibration technique suitable for Built-In Self Test (BIST). The microhotplate thermal resistance (thermal efficiency) and the thermal voltage from an integrated platinum-rhodium thermocouple were calibrated against a fres...
Autores principales: | Afridi, M., Montgomery, C., Cooper-Balis, E., Semancik, S., Kreider, K. G., Geist, J. |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
2011
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4551223/ https://www.ncbi.nlm.nih.gov/pubmed/26989603 http://dx.doi.org/10.6028/jres.116.025 |
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