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Optical Characterization of Lorentz Force Based CMOS-MEMS Magnetic Field Sensor

Magnetic field sensors are becoming an essential part of everyday life due to the improvements in their sensitivities and resolutions, while at the same time they have become compact, smaller in size and economical. In the work presented herein a Lorentz force based CMOS-MEMS magnetic field sensor i...

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Detalles Bibliográficos
Autores principales:	Dennis, John Ojur, Ahmad, Farooq, Khir, M. Haris Bin Md, Hamid, Nor Hisham Bin
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2015
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4570319/ https://www.ncbi.nlm.nih.gov/pubmed/26225972 http://dx.doi.org/10.3390/s150818256

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