Cargando…
Optical Characterization of Lorentz Force Based CMOS-MEMS Magnetic Field Sensor
Magnetic field sensors are becoming an essential part of everyday life due to the improvements in their sensitivities and resolutions, while at the same time they have become compact, smaller in size and economical. In the work presented herein a Lorentz force based CMOS-MEMS magnetic field sensor i...
Autores principales: | Dennis, John Ojur, Ahmad, Farooq, Khir, M. Haris Bin Md, Hamid, Nor Hisham Bin |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2015
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4570319/ https://www.ncbi.nlm.nih.gov/pubmed/26225972 http://dx.doi.org/10.3390/s150818256 |
Ejemplares similares
-
Fabrication and Characterization of a CMOS-MEMS Humidity Sensor
por: Dennis, John-Ojur, et al.
Publicado: (2015) -
Design, fabrication, characterization and reliability study of CMOS-MEMS Lorentz-force magnetometers
por: Valle, J. J., et al.
Publicado: (2022) -
A Low-Cost CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass
por: Khir, Mohd Haris Md, et al.
Publicado: (2011) -
A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices
por: Algamili, Abdullah Saleh, et al.
Publicado: (2021) -
Highly sensitive low field Lorentz-force MEMS magnetometer
por: Mbarek, Sofiane Ben, et al.
Publicado: (2021)