Fabrication of UV Photodetector on TiO(2)/Diamond Film

The properties of ultraviolet (UV) photodetector fabricated on TiO(2)/diamond film were investigated. Single crystal diamond layer was grown on high-pressure-high-temperature Ib-type diamond substrate by microwave plasma chemical vapor deposition method, upon which TiO(2) film was prepared directly...

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Detalles Bibliográficos
Autores principales: Liu, Zhangcheng, Li, Fengnan, Li, Shuoye, Hu, Chao, Wang, Wei, Wang, Fei, Lin, Fang, Wang, Hongxing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4585841/
https://www.ncbi.nlm.nih.gov/pubmed/26399514
http://dx.doi.org/10.1038/srep14420
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author Liu, Zhangcheng
Li, Fengnan
Li, Shuoye
Hu, Chao
Wang, Wei
Wang, Fei
Lin, Fang
Wang, Hongxing
author_facet Liu, Zhangcheng
Li, Fengnan
Li, Shuoye
Hu, Chao
Wang, Wei
Wang, Fei
Lin, Fang
Wang, Hongxing
author_sort Liu, Zhangcheng
collection PubMed
description The properties of ultraviolet (UV) photodetector fabricated on TiO(2)/diamond film were investigated. Single crystal diamond layer was grown on high-pressure-high-temperature Ib-type diamond substrate by microwave plasma chemical vapor deposition method, upon which TiO(2) film was prepared directly using radio frequency magnetron sputtering technique in Ar and O(2) mixing atmosphere. Tungsten was used as electrode material to fabricate metal-semiconductor-metal UV photodetector. The dark current is measured to be 1.12 pA at 30 V. The photo response of the device displays an obvious selectivity between UV and visible light, and the UV-to-visible rejection ratio can reach 2 orders of magnitude. Compared with that directly on diamond film, photodetector on TiO(2)/diamond film shows higher responsivity.
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spelling pubmed-45858412015-09-29 Fabrication of UV Photodetector on TiO(2)/Diamond Film Liu, Zhangcheng Li, Fengnan Li, Shuoye Hu, Chao Wang, Wei Wang, Fei Lin, Fang Wang, Hongxing Sci Rep Article The properties of ultraviolet (UV) photodetector fabricated on TiO(2)/diamond film were investigated. Single crystal diamond layer was grown on high-pressure-high-temperature Ib-type diamond substrate by microwave plasma chemical vapor deposition method, upon which TiO(2) film was prepared directly using radio frequency magnetron sputtering technique in Ar and O(2) mixing atmosphere. Tungsten was used as electrode material to fabricate metal-semiconductor-metal UV photodetector. The dark current is measured to be 1.12 pA at 30 V. The photo response of the device displays an obvious selectivity between UV and visible light, and the UV-to-visible rejection ratio can reach 2 orders of magnitude. Compared with that directly on diamond film, photodetector on TiO(2)/diamond film shows higher responsivity. Nature Publishing Group 2015-09-24 /pmc/articles/PMC4585841/ /pubmed/26399514 http://dx.doi.org/10.1038/srep14420 Text en Copyright © 2015, Macmillan Publishers Limited http://creativecommons.org/licenses/by/4.0/ This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/
spellingShingle Article
Liu, Zhangcheng
Li, Fengnan
Li, Shuoye
Hu, Chao
Wang, Wei
Wang, Fei
Lin, Fang
Wang, Hongxing
Fabrication of UV Photodetector on TiO(2)/Diamond Film
title Fabrication of UV Photodetector on TiO(2)/Diamond Film
title_full Fabrication of UV Photodetector on TiO(2)/Diamond Film
title_fullStr Fabrication of UV Photodetector on TiO(2)/Diamond Film
title_full_unstemmed Fabrication of UV Photodetector on TiO(2)/Diamond Film
title_short Fabrication of UV Photodetector on TiO(2)/Diamond Film
title_sort fabrication of uv photodetector on tio(2)/diamond film
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4585841/
https://www.ncbi.nlm.nih.gov/pubmed/26399514
http://dx.doi.org/10.1038/srep14420
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