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Going far beyond the near-field diffraction limit via plasmonic cavity lens with high spatial frequency spectrum off-axis illumination

For near-field imaging optics, minimum resolvable feature size is highly constrained by the near-field diffraction limit associated with the illumination light wavelength and the air distance between the imaging devices and objects. In this study, a plasmonic cavity lens composed of Ag-photoresist-A...

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Autores principales: Zhao, Zeyu, Luo, Yunfei, Zhang, Wei, Wang, Changtao, Gao, Ping, Wang, Yanqin, Pu, Mingbo, Yao, Na, Zhao, Chengwei, Luo, Xiangang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2015
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4609954/
https://www.ncbi.nlm.nih.gov/pubmed/26477856
http://dx.doi.org/10.1038/srep15320
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author Zhao, Zeyu
Luo, Yunfei
Zhang, Wei
Wang, Changtao
Gao, Ping
Wang, Yanqin
Pu, Mingbo
Yao, Na
Zhao, Chengwei
Luo, Xiangang
author_facet Zhao, Zeyu
Luo, Yunfei
Zhang, Wei
Wang, Changtao
Gao, Ping
Wang, Yanqin
Pu, Mingbo
Yao, Na
Zhao, Chengwei
Luo, Xiangang
author_sort Zhao, Zeyu
collection PubMed
description For near-field imaging optics, minimum resolvable feature size is highly constrained by the near-field diffraction limit associated with the illumination light wavelength and the air distance between the imaging devices and objects. In this study, a plasmonic cavity lens composed of Ag-photoresist-Ag form incorporating high spatial frequency spectrum off-axis illumination (OAI) is proposed to realize deep subwavelength imaging far beyond the near-field diffraction limit. This approach benefits from the resonance effect of the plasmonic cavity lens and the wavevector shifting behavior via OAI, which remarkably enhances the object’s subwavelength information and damps negative imaging contribution from the longitudinal electric field component in imaging region. Experimental images of well resolved 60-nm half-pitch patterns under 365-nm ultra-violet light are demonstrated at air distance of 80 nm between the mask patterns and plasmonic cavity lens, approximately four-fold longer than that in the conventional near-field lithography and superlens scheme. The ultimate air distance for the 60-nm half-pitch object could be theoretically extended to 120 nm. Moreover, two-dimensional L-shape patterns and deep subwavelength patterns are illustrated via simulations and experiments. This study promises the significant potential to make plasmonic lithography as a practical, cost-effective, simple and parallel nano-fabrication approach.
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spelling pubmed-46099542015-10-29 Going far beyond the near-field diffraction limit via plasmonic cavity lens with high spatial frequency spectrum off-axis illumination Zhao, Zeyu Luo, Yunfei Zhang, Wei Wang, Changtao Gao, Ping Wang, Yanqin Pu, Mingbo Yao, Na Zhao, Chengwei Luo, Xiangang Sci Rep Article For near-field imaging optics, minimum resolvable feature size is highly constrained by the near-field diffraction limit associated with the illumination light wavelength and the air distance between the imaging devices and objects. In this study, a plasmonic cavity lens composed of Ag-photoresist-Ag form incorporating high spatial frequency spectrum off-axis illumination (OAI) is proposed to realize deep subwavelength imaging far beyond the near-field diffraction limit. This approach benefits from the resonance effect of the plasmonic cavity lens and the wavevector shifting behavior via OAI, which remarkably enhances the object’s subwavelength information and damps negative imaging contribution from the longitudinal electric field component in imaging region. Experimental images of well resolved 60-nm half-pitch patterns under 365-nm ultra-violet light are demonstrated at air distance of 80 nm between the mask patterns and plasmonic cavity lens, approximately four-fold longer than that in the conventional near-field lithography and superlens scheme. The ultimate air distance for the 60-nm half-pitch object could be theoretically extended to 120 nm. Moreover, two-dimensional L-shape patterns and deep subwavelength patterns are illustrated via simulations and experiments. This study promises the significant potential to make plasmonic lithography as a practical, cost-effective, simple and parallel nano-fabrication approach. Nature Publishing Group 2015-10-19 /pmc/articles/PMC4609954/ /pubmed/26477856 http://dx.doi.org/10.1038/srep15320 Text en Copyright © 2015, Macmillan Publishers Limited http://creativecommons.org/licenses/by/4.0/ This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/
spellingShingle Article
Zhao, Zeyu
Luo, Yunfei
Zhang, Wei
Wang, Changtao
Gao, Ping
Wang, Yanqin
Pu, Mingbo
Yao, Na
Zhao, Chengwei
Luo, Xiangang
Going far beyond the near-field diffraction limit via plasmonic cavity lens with high spatial frequency spectrum off-axis illumination
title Going far beyond the near-field diffraction limit via plasmonic cavity lens with high spatial frequency spectrum off-axis illumination
title_full Going far beyond the near-field diffraction limit via plasmonic cavity lens with high spatial frequency spectrum off-axis illumination
title_fullStr Going far beyond the near-field diffraction limit via plasmonic cavity lens with high spatial frequency spectrum off-axis illumination
title_full_unstemmed Going far beyond the near-field diffraction limit via plasmonic cavity lens with high spatial frequency spectrum off-axis illumination
title_short Going far beyond the near-field diffraction limit via plasmonic cavity lens with high spatial frequency spectrum off-axis illumination
title_sort going far beyond the near-field diffraction limit via plasmonic cavity lens with high spatial frequency spectrum off-axis illumination
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4609954/
https://www.ncbi.nlm.nih.gov/pubmed/26477856
http://dx.doi.org/10.1038/srep15320
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