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Low-Actuation Voltage MEMS Digital-to-Analog Converter with Parylene Spring Structures

We propose an electrostatically-actuated microelectromechanical digital-to-analog converter (M-DAC) device with low actuation voltage. The spring structures of the silicon-based M-DAC device were monolithically fabricated using parylene-C. Because the Young’s modulus of parylene-C is considerably lo...

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Detalles Bibliográficos
Autores principales:	Ma, Cheng-Wen, Lee, Fu-Wei, Liao, Hsin-Hung, Kuo, Wen-Cheng, Yang, Yao-Joe
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2015
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4610465/ https://www.ncbi.nlm.nih.gov/pubmed/26343682 http://dx.doi.org/10.3390/s150921567

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