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Research on the Sensing Performance of the Tuning Fork-Probe as a Micro Interaction Sensor

The shear force position system has been widely used in scanning near-field optical microscopy (SNOM) and recently extended into the force sensing area. The dynamic properties of a tuning fork (TF), the core component of this system, directly determine the sensing performance of the shear positionin...

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Detalles Bibliográficos
Autores principales: Gao, Fengli, Li, Xide
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2015
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4610590/
https://www.ncbi.nlm.nih.gov/pubmed/26404310
http://dx.doi.org/10.3390/s150924530
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author Gao, Fengli
Li, Xide
author_facet Gao, Fengli
Li, Xide
author_sort Gao, Fengli
collection PubMed
description The shear force position system has been widely used in scanning near-field optical microscopy (SNOM) and recently extended into the force sensing area. The dynamic properties of a tuning fork (TF), the core component of this system, directly determine the sensing performance of the shear positioning system. Here, we combine experimental results and finite element method (FEM) analysis to investigate the dynamic behavior of the TF probe assembled structure (TF-probe). Results from experiments under varying atmospheric pressures illustrate that the oscillation amplitude of the TF-probe is linearly related to the quality factor, suggesting that decreasing the pressure will dramatically increase the quality factor. The results from FEM analysis reveal the influences of various parameters on the resonant performance of the TF-probe. We compared numerical results of the frequency spectrum with the experimental data collected by our recently developed laser Doppler vibrometer system. Then, we investigated the parameters affecting spatial resolution of the SNOM and the dynamic response of the TF-probe under longitudinal and transverse interactions. It is found that the interactions in transverse direction is much more sensitive than that in the longitudinal direction. Finally, the TF-probe was used to measure the friction coefficient of a silica–silica interface.
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spelling pubmed-46105902015-10-26 Research on the Sensing Performance of the Tuning Fork-Probe as a Micro Interaction Sensor Gao, Fengli Li, Xide Sensors (Basel) Article The shear force position system has been widely used in scanning near-field optical microscopy (SNOM) and recently extended into the force sensing area. The dynamic properties of a tuning fork (TF), the core component of this system, directly determine the sensing performance of the shear positioning system. Here, we combine experimental results and finite element method (FEM) analysis to investigate the dynamic behavior of the TF probe assembled structure (TF-probe). Results from experiments under varying atmospheric pressures illustrate that the oscillation amplitude of the TF-probe is linearly related to the quality factor, suggesting that decreasing the pressure will dramatically increase the quality factor. The results from FEM analysis reveal the influences of various parameters on the resonant performance of the TF-probe. We compared numerical results of the frequency spectrum with the experimental data collected by our recently developed laser Doppler vibrometer system. Then, we investigated the parameters affecting spatial resolution of the SNOM and the dynamic response of the TF-probe under longitudinal and transverse interactions. It is found that the interactions in transverse direction is much more sensitive than that in the longitudinal direction. Finally, the TF-probe was used to measure the friction coefficient of a silica–silica interface. MDPI 2015-09-23 /pmc/articles/PMC4610590/ /pubmed/26404310 http://dx.doi.org/10.3390/s150924530 Text en © 2015 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Gao, Fengli
Li, Xide
Research on the Sensing Performance of the Tuning Fork-Probe as a Micro Interaction Sensor
title Research on the Sensing Performance of the Tuning Fork-Probe as a Micro Interaction Sensor
title_full Research on the Sensing Performance of the Tuning Fork-Probe as a Micro Interaction Sensor
title_fullStr Research on the Sensing Performance of the Tuning Fork-Probe as a Micro Interaction Sensor
title_full_unstemmed Research on the Sensing Performance of the Tuning Fork-Probe as a Micro Interaction Sensor
title_short Research on the Sensing Performance of the Tuning Fork-Probe as a Micro Interaction Sensor
title_sort research on the sensing performance of the tuning fork-probe as a micro interaction sensor
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4610590/
https://www.ncbi.nlm.nih.gov/pubmed/26404310
http://dx.doi.org/10.3390/s150924530
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