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Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications
A capacitive micromachined ultrasonic transducer structure for use in underwater imaging is designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation layer is inserted between the top electrodes and the vibration membrane to prevent ohmic contact. The capacitance...
Autores principales: | Song, Jinlong, Xue, Chenyang, He, Changde, Zhang, Rui, Mu, Linfeng, Cui, Juan, Miao, Jing, Liu, Yuan, Zhang, Wendong |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2015
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4610594/ https://www.ncbi.nlm.nih.gov/pubmed/26389902 http://dx.doi.org/10.3390/s150923205 |
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