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Optimization of Surface Acoustic Wave-Based Rate Sensors

The optimization of an surface acoustic wave (SAW)-based rate sensor incorporating metallic dot arrays was performed by using the approach of partial-wave analysis in layered media. The optimal sensor chip designs, including the material choice of piezoelectric crystals and metallic dots, dot thickn...

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Detalles Bibliográficos
Autores principales:	Xu, Fangqian, Wang, Wen, Shao, Xiuting, Liu, Xinlu, Liang, Yong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2015
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4634411/ https://www.ncbi.nlm.nih.gov/pubmed/26473865 http://dx.doi.org/10.3390/s151025761

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