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Method for the Characterization of Extreme-Ultraviolet Photoresist Outgassing
Outgassing from photoresists illuminated by extreme ultraviolet radiation can lead to degradation of the very expensive multilayer-coated optics in an extreme ultraviolet stepper. Reliable quantification of the various organic molecules outgassed by photoresists has been a challenging goal. We have...
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
2009
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4646569/ https://www.ncbi.nlm.nih.gov/pubmed/27504219 http://dx.doi.org/10.6028/jres.114.011 |