A Summary of Lightpipe Radiation Thermometry Research at NIST

During the last 10 years, research in light-pipe radiation thermometry has significantly reduced the uncertainties for temperature measurements in semiconductor processing. The National Institute of Standards and Technology (NIST) has improved the calibration of lightpipe radiation thermometers (LPR...

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Detalles Bibliográficos
Autor principal: Tsai, Benjamin K.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 2006
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4654607/
https://www.ncbi.nlm.nih.gov/pubmed/27274914
http://dx.doi.org/10.6028/jres.111.002

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