Low Cost Digital Vibration Meter

This report describes the development of a low cost, digital Micro Electro Mechanical System (MEMS) vibration meter that reports an approximation to the RMS acceleration of the vibration to which the vibration meter is subjected. The major mechanical element of this vibration meter is a cantilever b...

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Detalles Bibliográficos
Autores principales: Payne, W. Vance, Geist, Jon
Formato: Online Artículo Texto
Lenguaje:English
Publicado: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 2007
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4656009/
https://www.ncbi.nlm.nih.gov/pubmed/27110459
http://dx.doi.org/10.6028/jres.112.009
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author Payne, W. Vance
Geist, Jon
author_facet Payne, W. Vance
Geist, Jon
author_sort Payne, W. Vance
collection PubMed
description This report describes the development of a low cost, digital Micro Electro Mechanical System (MEMS) vibration meter that reports an approximation to the RMS acceleration of the vibration to which the vibration meter is subjected. The major mechanical element of this vibration meter is a cantilever beam, which is on the order of 500 µm in length, with a piezoresistor deposited at its base. Vibration of the device in the plane perpendicular to the cantilever beam causes it to bend, which produces a measurable change in the resistance of a piezoresistor. These changes in resistance along with a unique signal-processing scheme are used to determine an approximation to the RMS acceleration sensed by the device.
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spelling pubmed-46560092016-04-22 Low Cost Digital Vibration Meter Payne, W. Vance Geist, Jon J Res Natl Inst Stand Technol Article This report describes the development of a low cost, digital Micro Electro Mechanical System (MEMS) vibration meter that reports an approximation to the RMS acceleration of the vibration to which the vibration meter is subjected. The major mechanical element of this vibration meter is a cantilever beam, which is on the order of 500 µm in length, with a piezoresistor deposited at its base. Vibration of the device in the plane perpendicular to the cantilever beam causes it to bend, which produces a measurable change in the resistance of a piezoresistor. These changes in resistance along with a unique signal-processing scheme are used to determine an approximation to the RMS acceleration sensed by the device. [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 2007 2007-04-01 /pmc/articles/PMC4656009/ /pubmed/27110459 http://dx.doi.org/10.6028/jres.112.009 Text en https://creativecommons.org/publicdomain/zero/1.0/ The Journal of Research of the National Institute of Standards and Technology is a publication of the U.S. Government. The papers are in the public domain and are not subject to copyright in the United States. Articles from J Res may contain photographs or illustrations copyrighted by other commercial organizations or individuals that may not be used without obtaining prior approval from the holder of the copyright.
spellingShingle Article
Payne, W. Vance
Geist, Jon
Low Cost Digital Vibration Meter
title Low Cost Digital Vibration Meter
title_full Low Cost Digital Vibration Meter
title_fullStr Low Cost Digital Vibration Meter
title_full_unstemmed Low Cost Digital Vibration Meter
title_short Low Cost Digital Vibration Meter
title_sort low cost digital vibration meter
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4656009/
https://www.ncbi.nlm.nih.gov/pubmed/27110459
http://dx.doi.org/10.6028/jres.112.009
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