Form-Profiling of Optics Using the Geometry Measuring Machine and the M-48 CMM at NIST

We are developing an instrument, the Geometry Measuring Machine (GEMM), to measure the profile errors of aspheric and free form optical surfaces, with measurement uncertainties near 1 nm. Using GEMM, an optical profile is reconstructed from local curvatures of a surface, which are measured at points...

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Detalles Bibliográficos
Autores principales: Machkour-Deshayes, Nadia, Stoup, John, Lu, Z. Q. John, Soons, Johannes, Griesmann, Ulf, Polvani, Robert
Formato: Online Artículo Texto
Lenguaje:English
Publicado: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 2006
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4657786/
https://www.ncbi.nlm.nih.gov/pubmed/27274939
http://dx.doi.org/10.6028/jres.111.027

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4657786/
https://www.ncbi.nlm.nih.gov/pubmed/27274939
http://dx.doi.org/10.6028/jres.111.027

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