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Form-Profiling of Optics Using the Geometry Measuring Machine and the M-48 CMM at NIST
We are developing an instrument, the Geometry Measuring Machine (GEMM), to measure the profile errors of aspheric and free form optical surfaces, with measurement uncertainties near 1 nm. Using GEMM, an optical profile is reconstructed from local curvatures of a surface, which are measured at points...
Autores principales: | Machkour-Deshayes, Nadia, Stoup, John, Lu, Z. Q. John, Soons, Johannes, Griesmann, Ulf, Polvani, Robert |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
2006
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4657786/ https://www.ncbi.nlm.nih.gov/pubmed/27274939 http://dx.doi.org/10.6028/jres.111.027 |
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