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The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors

Focused electron beam induced deposition (FEBID) is a single-step, direct-write nanofabrication technique capable of writing three-dimensional metal-containing nanoscale structures on surfaces using electron-induced reactions of organometallic precursors. Currently FEBID is, however, limited in reso...

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Detalles Bibliográficos
Autores principales:	Thorman, Rachel M, Kumar T. P., Ragesh, Fairbrother, D Howard, Ingólfsson, Oddur
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Beilstein-Institut 2015
Materias:	Review
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4660900/ https://www.ncbi.nlm.nih.gov/pubmed/26665061 http://dx.doi.org/10.3762/bjnano.6.194

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